Plasma etching

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61	PDF Document Add to Reading List Source URL: www.ieee-uffc.org Language: English - Date: 2008-12-29 17:55:23 Technology Capacitive Micromachined Ultrasonic Transducers Microelectromechanical systems Etching Plasma-enhanced chemical vapor deposition Chemical vapor deposition Polycrystalline silicon Strain engineering Chemical-mechanical planarization Semiconductor device fabrication Materials science Chemistry
62	PDF Document Add to Reading List Source URL: microlab.berkeley.edu Language: English Microtechnology Technology Plasma processing Nanotechnology Thin film deposition Microelectromechanical systems Etching Chemical vapor deposition Surface micromachining Materials science Chemistry Semiconductor device fabrication